北緯科技提供全方位的IOC、SIOC及EIOC控制器維修服務，擁有專業技術團隊及完整測試設備，確保每一個控制器都能達到原廠規格標準，延長設備使用壽命，降低客戶維護成本。
| Description | OEM P/N |
|---|---|
| I/O Controller | 27-10157-00 |
| I/O Controller | 27-262408-00 |
| Description | OEM P/N |
|---|---|
| HDSIOC 0 | 02-252395-00 |
| HDSIOC 1 | 02-252396-00 |
| HDSIOC 2 | 02-252397-00 |
| HDSIOC E84 | 02-275644-00 |
| WTS HV SIOC 0 |
02-123962-00 02-251408-00 |
| WTS HV SIOC 1 | 02-123968-00 |
| WTS HV SIOC 2 | 02-266872-00 |
| WTS HV SIOC 3&4 | 02-123981-00 |
| IXT PVD SIOC1 |
02-167050-00 02-258471-00 |
| PVD IXT 0 | 02-272805-00 |
| SESIOC WAFER HANDLE | 02-168107-00 |
| SESIOC WTS 1 | 02-264834-00 |
| SIOC 2 MODULE | 02-143079-00 |
| SESIOC BATH NOVELLUS | 02-168108-00 |
| POST PLATE SESIOC | 02-168110-00 |
| Novellus 02-168112-00 SIOC 7 SESIOC | 02-168112-00 |
| SESIOC ANNEAL 4 NOVELLUS | 02-168111-00 |
| SIOC Anneal Controller Digital Dynamics | 01-133875-00 |
| SIOC Sabre | 02-314969-00 |
| SIOC ELECTROFILL MODULAR DRIVE | 02-258901-00 |
| Novellus 02-168109-00 SESIOC ELECTROFILL | 02-168109-00 |
| SIOC Anneal | 02-168111-00 |
| Description | OEM P/N |
|---|---|
| E-HD4 ANNEAL SBR | 02-286113-00 |
| ASM,EHDSIOC 2 ENH MNT PLT SBR | 02-392747-00 |
| E-HD 5 SBU SBR-XT | 02-370512-00 |
| EHDSIOC 7SAC IRIS SBR-XT | 02-370394-00 |
| E-HDSIOC C3 ALTUS 0 | 02-354551-00 |
| E-HD7 EXT EBR SBR-XT | 02-351870-00 |
| E-HD 3 POST PLT SBR-XT | 02-351783-00 |
| E-HDSIOC ALTUS 0 | 02-325957-00 |
| ASM,E-HDSIOC ALTUS 2 CMPLT |
02-360893-00 02-380738-00 |
| E-HDSIOC E84 AWG | 02-321482-00 |
| E-HDSIOC GAMMA 0 XPRS | 02-345069-00 |
| EHD SIOC 1 GSBX FLX | 02-361376-00 |
| ASM,E-HD 1 BATH SBR-XT | 02-351781-00 |
| E-HDSIOC GAMMA 1 XPRS | 02-345070-00 |
| ASM, EHDSIOC 2 ENH MNT PLT SBR | 02-392747-00 |
| E-HD 3 POST PLT SBR-XT | 02-351783-00 |
| E-HD 2 PLT SBR-XT | 02-351782-00 |
| Excel CNTRLR,FLEX COMBO,EIOC 0,VXL SSM NA | 61-393481-00 |
| EIOC,785-179350-002 | 785-179350-002 |
| EIOC,785-179350-002 | 02-396950-00 |
| CNTRLR,EIOC0,TOP PLATE,AMPDS,VXL | 61-410957-00 |
| ASM,FE-HD EIOC 0 TOP PLT W/TC | 02-390122-00 |
| ASSY,EIOC1,G400 Gamma | 02-361376-00 |
| ASM,FE-HD EIOC PLATE SBR 3D | 61-378381-00 |