北緯科技提供全方位的IOC、SIOC及EIOC控制器維修服務，擁有專業技術團隊及完整測試設備，確保每一個控制器都能達到原廠規格標準，延長設備使用壽命，降低客戶維護成本。
| Description | OEM P/N |
|---|---|
| I/O Controller | 27-10157-00 |
| I/O Controller | 27-262408-00 |
| Input/ Output Controller (IOC), Repair | 02-325960-00 |
| Input/ Output Controller (IOC), Repair | 02-440974-00 |
| Input/ Output Controller (IOC), Repair | 05-113897-00 |
| Input/ Output Controller (IOC), Repair | 27-10157-00 |
| Input/ Output Controller (IOC), Repair | 27-262408-00 |
| Description | OEM P/N |
|---|---|
| HDSIOC 0 | 02-252395-00 |
| HDSIOC 1 | 02-252396-00 |
| HDSIOC 2 | 02-252397-00 |
| HDSIOC E84 | 02-275644-00 |
| WTS HV SIOC 0 | 02-123962-00 02-251408-00 |
| WTS HV SIOC 1 | 02-123968-00 |
| WTS HV SIOC 2 | 02-266872-00 |
| WTS HV SIOC 3&4 | 02-123981-00 |
| IXT PVD SIOC1 | 02-167050-00 02-258471-00 |
| PVD IXT 0 | 02-272805-00 |
| SESIOC WAFER HANDLE | 02-168107-00 |
| SESIOC WTS 1 | 02-264834-00 |
| SIOC 2 MODULE | 02-143079-00 |
| SESIOC BATH NOVELLUS | 02-168108-00 |
| POST PLATE SESIOC | 02-168110-00 |
| Novellus 02-168112-00 SIOC 7 SESIOC | 02-168112-00 |
| SESIOC ANNEAL 4 NOVELLUS | 02-168111-00 |
| SIOC Anneal Controller Digital Dynamics | 01-133875-00 |
| SIOC Sabre | 02-314969-00 |
| SIOC ELECTROFILL MODULAR DRIVE | 02-258901-00 |
| Novellus 02-168109-00 SESIOC ELECTROFILL | 02-168109-00 |
| SIOC Anneal | 02-168111-00 |
| Novellus post plate 2000 SIOC, Repair | 01-130508-00 |
| Wafer Handling 300 SIOC, Repair | 01-8056070-00 |
| SESIOC BATH, Repair | 02-168108-00 |
| SESIOC ELECTROFILL, Repair | 02-168109-00 |
| POST PLATE SESIOC, Repair | 02-168110-00 |
| SESIOC WTS1 FIELD CONNECTOR MODULE, Repair | 02-204634-00 |
| ALTUS 2 SIOC FIELD CONNECTOR MODULE, Repair | 02-285291-00 |
| HDSIOC 1 NexT, Repair | 02-307656-00 |
| HDSIOC 3 POST PLATE A76, Repair | 02-313554-00 |
| HDSIOC 1 BATH SBR-XT, REPAIR | 02-351781-00 |
| ASSY, EHDSIOC0, WFR HANDLE | 02-367659-00 |
| EHDSIOC 7 SAC SBR-XT A700, Repair | 02-370394-00 |
| CONTROLLER IO DUALCAP, Repair | 27-156710-00 |
| Description | OEM P/N |
|---|---|
| E-HD4 ANNEAL SBR | 02-286113-00 |
| ASM,EHDSIOC 2 ENH MNT PLT SBR | 02-392747-00 |
| E-HD 5 SBU SBR-XT | 02-370512-00 |
| EHDSIOC 7SAC IRIS SBR-XT | 02-370394-00 |
| E-HDSIOC C3 ALTUS 0 | 02-354551-00 |
| E-HD7 EXT EBR SBR-XT | 02-351870-00 |
| E-HD 3 POST PLT SBR-XT | 02-351783-00 |
| E-HDSIOC ALTUS 0 | 02-325957-00 |
| ASM,E-HDSIOC ALTUS 2 CMPLT | 02-360893-00 02-380738-00 |
| E-HDSIOC E84 AWG | 02-321482-00 |
| E-HDSIOC GAMMA 0 XPRS | 02-345069-00 |
| EHD SIOC 1 GSBX FLX | 02-361376-00 |
| ASM,E-HD 1 BATH SBR-XT | 02-351781-00 |
| E-HDSIOC GAMMA 1 XPRS | 02-345070-00 |
| ASM, EHDSIOC 2 ENH MNT PLT SBR | 02-392747-00 |
| E-HD 3 POST PLT SBR-XT | 02-351783-00 |
| E-HD 2 PLT SBR-XT | 02-351782-00 |
| Excel CNTRLR,FLEX COMBO,EIOC 0,VXL SSM NA | 61-393481-00 |
| EIOC,785-179350-002 | 785-179350-002 |
| EIOC,785-179350-002 | 02-396950-00 |
| CNTRLR,EIOC0,TOP PLATE,AMPDS,VXL | 61-410957-00 |
| ASM,FE-HD EIOC 0 TOP PLT W/TC | 02-390122-00 |
| ASSY,EIOC1,G400 Gamma | 02-361376-00 |
| ASM,FE-HD EIOC PLATE SBR 3D | 61-378381-00 |
| ANNEAL SBR XT E-HDSIOC 4, Repair | 02-286113-00 |
| Novellus E-HDSIOC E84 AWC, Repair | 02-321482-00 |
| LAM E-HDSIOC ALTUS 0, Repair | 02-325957-00 |
| LAM E-HDSIOC ALTUS 0, Repair | 02-325957-00 |
| LAM E-HDSIOC ALTUS 0, Repair | 02-325957-00 |
| E-HDSIOC ALTUS 1, Repair | 02-325960-00 |
| LAM WTS EIOC 0 WTS EIOC 1 | 02-334963-00 |
| LAM WTS EIOC 0 WTS EIOC 1 | 02-334968-00 |
| Novellus E-HDSIOC Altus 2, Repair | 02-349472-00 |
| HDSIOC 1 BATH SBR-XT, REPAIR | 02-351781-00 |
| EHDSIOC 3 POST PLATE A76, Repair | 02-351783-00 |
| EXTREME EBR EHDSIOC7, Repair | 02-351870-00 |
| NOVELLUS E-HDSIOC C3 ALTUS 0 | 02-354551-00 |
| Novellus E-HDSIOC 2, Repair | 02-360893-00 |
| ASSY, EIOC1, G400 Gamma | 02-361376-00 |
| EHDSIOC 7 SAC SBR-XT A700, Repair | 02-370394-00 |
| E-HDSIOC 5 SBU SBR-XT, Repair | 02-370512-00 |
| EIOC2 Controller (02-380738-00) | 02-380738-00 |
| Novellus E-HDSIOC Altus 2, Repair | 02-380738-00 |
| SABRE 3D FI EIOC, Repair | 02-384638-00 |
| EIOC0, TM, COMMON HANDLER, Repair | 02-390122-00 |
| ASM, EHDSIOC 2 ENH MNT PLT SBR, REPAIR | 02-392747-00 |
| GXT EIOC 0, Repair | 02-4400974-00 |
| EIOC1, Repair | 61-376824-00 |
| EXCEL DB EIOC3, Repair | 61-380630-00 |
| VECTOR EXTREME EIOC 0, Repair | 61-384617-00 |
| Excel CNTRLR, FLEX COMBO, EIOC 0, VXL SSM NA, Repair | 61-393481-00 |
| ASM, FE-HD EIOC 0 TOP PLT W/TC, Repair | 61-410957-00 |
| EMMA EIOC, Repair | 61-411414-00 |
| EIOC 2 PLATE FLEX SBR-XT, Repair | 61-420063-00 |
| VECTOR EXTREME EIOC 0, Repair | 61-422138-00 |
| SABRE 3D BATH EIOC 1-A4, Repair | 61-426074-00 |
| VECTOR EXTREME EIOC 1, REPAIR | 61-428059-00 |
| FE-HD EIOC PLATE SBR 3D, Repair | 61-430312-00 |
| ASM, FE-EIOC 1 BELOW CHAMBER, REPAIR | 61-437477-00 |
| SABRE 3D PLATE, Repair | 61-451479-00 |
| SABRE 3D BATH EIOC 1-A4, Repair | 61-726074-00 |
| EIOC 6 SRD/P-EBR/XMM, Repair | 685-181343-002 |
| MD EIOC 0 VXL, Repair | 685-183590-501 |
| MD EIOC 0 VXL, Repair | 685-183590-501 |
| EIOC1, Repair | 685-228922-001 |
| SABRE-XT EXCEL EIOC 1-A72, Repair | 685-228922-001 |
| EIOC 1, COMMON MACH1, Repair | 685-247270-101 |
| SABRE 3D PLATE EIOC, Repair | 685-259525-001 |
| SABRE 3D BATH EIOC 1-A4, Repair | 685-260621-001 |
| G3D BIAS-TFLXGB EIOC 1, Repair | 685-270769-001 |
| EIOC | 685-282365-502 |
| SABRE EIOC 1-MAIN BATH DUAL VMS-A72, Repair | 685-284298-001 |
| VECTOR HDSIOC 0, Repair | 685-294051-0001 |
| VECTOR HDSIOC 0, Repair | 685-294051-001 |
| VECTOR HDSIOC 0, Repair | 685-294051-001 |
| VECTOR E-HDSIOC1 | 685-294053-001 |
| VECTOR HDSIOC 1 | 685-294053-001 |
| VECTOR E-HDSIOC2 | 685-294055-001 |
| VECTOR HDSIOC2 | 685-294055-001 |
| SABRE EIOC 1-MAIN BATH DUAL VMS-A72, Repair | 685-332601-001 |
| EIOC 2 PLATE FLEX SBR-XT, Repair | 685-332603-001 |
| EHDSIOC 3 POST PLATE A76, Repair | 685-332604-001 |
| ANNEAL SBR XT E-HDSIOC 4, Repair | 685-332610-001 |
| EIOC1, Repair | 853-150995-001 |
| EIOC 1 BELOW CHAMBER, Repair | 853-151673-002 |
| EIOC1 VXL/VXI, Repair | 853-162840-002 |
| EIOC 0 VXL, Repair | 853-183590-002 |
| SABRE 3D PLATE, Repair | 853-201504-00 |
| EIOC1, Repair | 853-201504-001 |
| SABRE 3D PLATE, Repair | 853-201504-001 |
| EIOC0, TM, COMMON HANDLER, Repair | 853-208497-001 |
| VERSA-T, EIOC, Repair | 853-223258-002 |
| VECTOR EXTREME EIOC1, Repair | 853-234933-001 |
| ASSY, EIOC1, G400 Gamma | R02-361376-00 |
| EXCEL DB EIOC3 | R61-380630-00 |
| VECTOR EXTREME EIOC0, Repair | R61-384514-00 |
| VECTOR EXTREME EIOC 1, REPAIR | R61-428059-00 |